HTS-SMP01 Silicon Resonant Pressure Sensors

HTS-SMP01 Silicon Resonant Pressure Sensor belongs to high-precision MEMS pressure sensors. Equipped with tuning-fork resonator working via in-plane vibration, it uses non-contact electrostatic drive and capacitive signal acquisition. External pressure deforms silicon diaphragm to shift resonant frequency; integrated closed-loop feedback circuit realizes real-time temperature & nonlinear compensation, outputting linear frequency signals with superior repeatability and linearity.