Product Detail
The HTS-SMP01 Series Silicon Resonant Pressure Sensor is a high-performance MEMS (Micro-Electro-Mechanical Systems) pressure sensor. Silicon resonant pressure sensors represent the pinnacle of precision in the field of pressure measurement; thanks to their high accuracy, excellent long-term stability, and quasi-digital signal output, they are widely used in equipment such as air data measurement systems, precision pressure controllers, and meteorological instruments.
The core sensing element of the HTS-SMP01 silicon resonant pressure sensors utilizes a tuning-fork resonator configuration, operating primarily through in-plane vibration. The vibration drive and signal detection system employs a non-contact electrostatic excitation and capacitive sensing scheme: an electrostatic voltage induces stable, periodic vibration in the tuning-fork resonator. When external pressure acts on the silicon diaphragm, the resulting deformation alters the resonator's natural frequency; a capacitive detection unit precisely captures changes in vibration amplitude and frequency. An integrated closed-loop feedback control circuit adjusts the excitation voltage in real-time to maintain resonance stability and applies hardware-based compensation for temperature and nonlinearity errors. The final output is a frequency signal linearly correlated with the measured pressure, ensuring excellent linearity and high data repeatability.
The core sensing element of the HTS-SMP01 silicon resonant pressure sensors utilizes a tuning-fork resonator configuration, operating primarily through in-plane vibration. The vibration drive and signal detection system employs a non-contact electrostatic excitation and capacitive sensing scheme: an electrostatic voltage induces stable, periodic vibration in the tuning-fork resonator. When external pressure acts on the silicon diaphragm, the resulting deformation alters the resonator's natural frequency; a capacitive detection unit precisely captures changes in vibration amplitude and frequency. An integrated closed-loop feedback control circuit adjusts the excitation voltage in real-time to maintain resonance stability and applies hardware-based compensation for temperature and nonlinearity errors. The final output is a frequency signal linearly correlated with the measured pressure, ensuring excellent linearity and high data repeatability.
The HTS-SMP01 series silicon resonant pressure sensors feature standardized, minimalist pressure and electrical interfaces. It achieves extreme miniaturization while fully preserving high-precision sensing performance, ensuring ease of installation and removal as well as strong assembly compatibility.