HTS-SMP01 Silicon Resonant Pressure Sensors-China professional high accuracy pressure sensor supplier-Hitech Sensors Tech Co., Ltd

product

We are good at what others can't do

Home product Industrial Sensors Pressure Sensors

HTS-SMP01 Silicon Resonant Pressure Sensors

HTS-SMP01 Silicon Resonant Pressure Sensor belongs to high-precision MEMS pressure sensors. Equipped with tuning-fork resonator working via in-plane vibration, it uses non-contact electrostatic drive and capacitive signal acquisition. External pressure deforms silicon diaphragm to shift resonant frequency; integrated closed-loop feedback circuit realizes real-time temperature & nonlinear compensation, outputting linear frequency signals with superior repeatability and linearity.

Product Detail

The HTS-SMP01 Series Silicon Resonant Pressure Sensor is a high-performance MEMS (Micro-Electro-Mechanical Systems) pressure sensor. Silicon resonant pressure sensors represent the pinnacle of precision in the field of pressure measurement; thanks to their high accuracy, excellent long-term stability, and quasi-digital signal output, they are widely used in equipment such as air data measurement systems, precision pressure controllers, and meteorological instruments.

The core sensing element of the HTS-SMP01 silicon resonant pressure sensors utilizes a tuning-fork resonator configuration, operating primarily through in-plane vibration. The vibration drive and signal detection system employs a non-contact electrostatic excitation and capacitive sensing scheme: an electrostatic voltage induces stable, periodic vibration in the tuning-fork resonator. When external pressure acts on the silicon diaphragm, the resulting deformation alters the resonator's natural frequency; a capacitive detection unit precisely captures changes in vibration amplitude and frequency. An integrated closed-loop feedback control circuit adjusts the excitation voltage in real-time to maintain resonance stability and applies hardware-based compensation for temperature and nonlinearity errors. The final output is a frequency signal linearly correlated with the measured pressure, ensuring excellent linearity and high data repeatability.

The HTS-SMP01 series silicon resonant pressure sensors feature standardized, minimalist pressure and electrical interfaces. It achieves extreme miniaturization while fully preserving high-precision sensing performance, ensuring ease of installation and removal as well as strong assembly compatibility.

Features Applications

• The comprehensive accuracy across the full temperature and full measurement ranges can reach ±0.01% F.S • Aerospace
• The widest temperature range extends from -55°C to 85°C • Oil & Gas Energy
• Pressure-frequency signal output • Meteorological Detection
• Flexible electrical and pressure interface configurations • Marine & Shipbuilding

Performance Characteristics

Range	Pressure type	Measured medium	Overload pressure
140kPa	Absolute pressure	Dry, non-corrosive gas	140kPa: 3.0×F.S.
280kPa			280kPa: 1.5×F.S.
350kPa			350kPa: 1.2×F.S.
The calibration range can be freely selected within the range from 0 to the optional maximum pressure, with a minimum calibration pressure of 5 kPa.
Breaking pressure	Compensated temperature range	Power supply	Current consumption
140kPa: 3.5×F.S.	-40℃~80℃ -55℃~85℃	15V±0.5V	≤30mA
280kPa: 2.0×F.S.
350kPa: 1.5×F.S.
Output method	Output frequency range	Overall accuracy	Response time
Pressure Frequency + Temperature Frequency	Pressure frequency: 30 kHz–50 kHz	±0.01%F.S.	<25 ms when pressure changes from 10% F.S. to 90% F.S.
Pressure Frequency + Temperature SPI	Temperature frequency:2 kHz–15 kHz	±0.02 %F.S.	<25 ms when pressure changes from 10% F.S. to 90% F.S.
Start-up time	Long-term stability	Effect of acceleration	Pressure interface
Reaches accuracy specifications within 250 ms after power-up	High-precision grade ±0.01% F.S.	＜5 Pa/g	φ2mm×7mm
	Standard grade ±0.02% F.S.	＜5 Pa/g	φ2mm×7mm
Note: Output format: Both pressure and temperature outputs are square-wave frequency signals, with optional square wave levels of 3.3V TTL and 5V TTL.

Dimension & Drawing