The MAX53X MEMS Accelerometer chip is a single-axis high-performance accelerometer. The detection of acceleration-sensitive axes is parallel to the chip surface. The direction along the chip surface pointing to the first pin of the chip is the positive direction of the acceleration sensitive axis. The MAX53X MEMS Accelerometer adopts 48-pin ceramic package, its Interface access via SPI. Using advanced micromachining technology, and developed an accelerometer chip with high sensitivity and wide measurement range. In terms of low stress and overload resistance design, we use innovative structural design and material selection to ensure that the MEMS accelerometer can maintain stable performance when subjected to high overload shocks, while reducing the stress inside the accelerometer chip and improving the reliability and service life of the product.

The sensitivity of our MEMS accelerometer chip can reach 100mV/g, which can accurately sense tiny acceleration changes. For the measurement range, it has a wide range which covering the range of ±2g to ±100g, which can meet the acceleration measurement needs of different application scenarios.

MEMS accelerometers, with their advantages of miniaturization, high integration and low cost, have been widely used in many fields such as industrial production, industrial equipment monitoring and maintenance, unmanned system navigation and control, and marine monitoring.

Dimension & Drawing